Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2254 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-547 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2254 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L83-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-068 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-0682 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1804 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-068 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04 |
filingDate |
2010-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_789739ea95f715cfaaad933eb89bf7b4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b928a3540b1f1fe626eee7d37928010 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_631161c16493a036f9c577f659616640 |
publicationDate |
2011-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
DE-102010050552-A1 |
titleOfInvention |
Mask material composition, impurity diffusion layer forming method and solar battery |
abstract |
A mask material composition used for a diffusion barrier of an impurity diffusion component into a semiconductor substrate, comprising a siloxane resin (A1) containing a recurring unit represented by the following formula (a1): wherein R 1 is a single bond or C 1 -C 5 alkylene group; and R 2 is a C 6 -C 20 aryl group. |
priorityDate |
2009-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |