| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36f8253f3d0d59bcd9259217d4385d10 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-288 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-41
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-283
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321 |
| filingDate |
2010-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1738a2b117cb6e74a7dcd0a81872145
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_658e354db3bad687ab9c95f55fd49b7f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_664ebb34eafe1b372cf2ffedd25eeca8 |
| publicationDate |
2014-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-102010037247-B4 |
| titleOfInvention |
Semiconductor structure and method for its production |
| abstract |
A method of making a semiconductor structure, the method comprising: Forming an opening (120) at least partially through a workpiece (110); and Forming an enclosed cavity (520) within the opening (120), wherein forming the cavity (520) comprises forming a paste (440) within the opening (120); Wherein forming the trapped cavity (520) further comprises sintering the paste (440); and Wherein the opening (120) includes a lowermost portion without the paste (440). |
| priorityDate |
2009-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |