| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd446fb0d73aa96d044fea2eaa3c8ebc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-096
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0181 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00095 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-283
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-02 |
| filingDate |
2010-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e38a989660298c5391a303eaaf89622c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c0e56aac80415e7d70c731e9cbf8f6d3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dbda43f4b0fb77f16dccea87f8d39b0e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_256bb5b38edb89e86e6c52422cbf879f |
| publicationDate |
2011-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-102010001572-A1 |
| titleOfInvention |
Method of making a via |
| abstract |
The invention relates to a method for producing a through-contact, which is simple and inexpensive to carry out and thereby allows a most compliant deposition of the electrically conductive layer. The method comprises the steps of: a) providing a substrate (1), wherein the substrate (1) comprises a functional layer on the surface of a first side (2) and further wherein the substrate (1) comprises a trench (3), wherein the Trench (3) is designed as a slot and from a second, the first side opposite side (4) through the substrate (1) through to the functional layer reaches; b) depositing a conductive layer (6) within the trench (3). |
| priorityDate |
2010-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |