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publicationDate 2019-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber DE-102009055326-B4
titleOfInvention High purity quartz glass with low absolute refractive index
abstract A fused silica article wherein the fused silica article has a combined concentration of protium-containing hydroxyl groups and deuteroxyl groups of less than 10 ppm, the fused silica article having an absolute refractive index of less than or equal to 1.560820 at a wavelength of 193.368 nm, the fused article having a fictitious temperature T f of less than 1050 ° C, and wherein the quartz article has a total halogen concentration of less than 10 ppm by weight.
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