http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102009042711-B4

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filingDate 2009-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2020-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a64dc8d8b34571337acbe88d67493b3c
publicationDate 2020-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber DE-102009042711-B4
titleOfInvention Channel stop trench semiconductor devices and processes
abstract A semiconductor component comprising: a semiconductor substrate (2) having a first surface (11), an active region (AA) and a peripheral region (PA); at least one channel stop trench (40) formed in the semiconductor substrate (2), the channel stop trench (40) extends from the first surface (11) at least partially into the semiconductor substrate (2) and is arranged between the active region (AA) and the peripheral region (PA); at least one electrode (41) arranged in the channel stop trench (40); a peripheral contact region (14) of the semiconductor substrate, which is arranged in the peripheral region (PA) on the first surface (11) of the semiconductor substrate (2); a conductive layer (15), in electrical contact with the electrode (41) arranged in the channel stop trench (40) ) and formed in electrical contact with the peripheral contact region (14), the conductive layer (15) being electrically connected to the semiconductor substrate (2) in the peripheral region (PA) and is electrically isolated from the semiconductor substrate (2) in the active area (AA); anda chipping stop trench (46) formed in the semiconductor substrate, the chipping stop trench (46) being arranged in the peripheral region (PA) between the channel stop trench (40) and the peripheral contact region (14).
priorityDate 2008-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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