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publicationDate 2010-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber DE-102009033424-A1
titleOfInvention Semiconductor component and method for its production
abstract A semiconductor device and a method of making the same include forming a second copper-plated layer over a second IMD layer and in a second opening by a plating process using the exposed first copper-plated layer as the seed layer. With the method, the copper-plated layer can be formed easier and faster and obtain better gap filling properties.
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