| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_375e56c930a010a3edfedac830bb8bb1 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-0064
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-1061
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-2232
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-1307
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-034
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-2316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-136 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-005 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05G2-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01S3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-034 |
| filingDate |
2009-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c0f266e0f2c3b24903886a88e2789cb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70e9275d5d537cc586f6bcfd95d07262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_efc2e7fe80c864a9e8632e10a59cf577
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_237c16dc7784f0b64e68311970c201bf |
| publicationDate |
2010-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-102009029605-A1 |
| titleOfInvention |
An extreme ultraviolet light source device, a laser light source device for an extreme ultraviolet light source device, and a method of adjusting a laser light source device for an extreme ultraviolet light source device |
| abstract |
An EUV light source device properly compensates the wavefront of a laser beam that is changed by heat. A wavefront compensator and a sensor are provided in the amplification system that amplifies the laser beam. The sensor detects and outputs changes in the angle (direction) of the laser beam and the curvature of the wavefront thereof. A wavefront compensation controller outputs a signal to the wavefront compensator based on the measurement results from the sensor. The wavefront compensator corrects the wavefront of the laser beam to a given wavefront according to a command from the wavefront compensation controller. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102012201557-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9444214-B2 |
| priorityDate |
2008-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |