http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102009019422-B4
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3444 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3467 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3408 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-40 |
| filingDate | 2009-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58addf5041df9e113d3cbbabc7acd407 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7732ff0d915c10e4ca9d7b6c663c7c4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16e9a8904ca126e6a5415d31e8cdb2a6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_52b6a1eb8fd56d6d90d515e5f81a1495 |
| publicationDate | 2014-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-102009019422-B4 |
| titleOfInvention | Method for generating a plasma by means of a magnetron |
| abstract | A method for generating a plasma by means of at least one magnetron, wherein the magnetron, the electrical energy supplied in the form of electrical pulses and thus the strength of the magnetron discharge maintaining electric field is changed at a first frequency and wherein the strength of a magnetic field penetrating the magnetron with a second frequency is changed, characterized in that a) the second frequency is set in a range of 0.1 Hz to 1 kHz; b) the maximum strength of the magnetic field is set at least 5 times higher than the average strength of the magnetic field; c) the first frequency is set at least 10 times higher than the second frequency and d) the first frequency is increased at least until, during a rising edge of the magnetic field strength, after the ignition of a plasma, a renewed electrical pulse is generated at the latest when the value of a physical quantity characterizing the intensity of the plasma falls to 2% of its during of the previous electrical pulse maximum value has fallen off. |
| priorityDate | 2009-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID94359 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419593302 |
Total number of triples: 23.