http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102009015604-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ddcb273a108a5d8472b335280098e06 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K1-0306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-244 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-0361 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-09845 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-107 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32139 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-062 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308 |
| filingDate | 2009-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa5db4425dffbfc8af22c61a14a248dd |
| publicationDate | 2010-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-102009015604-A1 |
| titleOfInvention | Method for structuring a multi-layered layer on a substrate |
| abstract | The invention relates to a method for structuring a layer (12) located on a substrate (11). According to the invention, it is provided that the uppermost layer (13) consists of a noble metal such as Au and is structured in the first process step by means of a laser beam (17). This results in an opening (18), so that the uppermost layer (13) is used as an etching mask. In a further step, the further layers (14, 15, 16) can be patterned by an etching treatment. In this case, the uppermost layer (13) remains on the lower layers (14, 15, 16) in the finished component and assumes a special function here (for example as a bonding surface). The method has the advantage that the separate production of an etching mask is not necessary, which would have to be removed again after the production of the component. |
| priorityDate | 2009-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.