http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102008052437-A1
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ddcb273a108a5d8472b335280098e06 |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0426 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0256 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0255 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-036 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-483 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-02 |
filingDate | 2008-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8182ed126e5cb98e58cc59a506b4da08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cfac4ed2d44b21bbf21db97ba6f685d0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7126c20fc4d48d9af164baa6b48e8f45 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_61f757ca38b53b0241a9f94b79c4efa2 |
publicationDate | 2010-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | DE-102008052437-A1 |
titleOfInvention | Device and method for detecting a substance with the aid of a thin-film resonator with an insulating layer |
abstract | The invention relates to a device for detecting at least one substance of a fluid, comprising a piezoacoustic thin-film resonator having at least one piezoelectric layer, an electrode layer arranged on the piezoelectric layer, at least one further electrode layer arranged on the piezoelectric layer and at least one attachment surface for attaching the substance of the fluid wherein the piezoelectric layer, the electrode layers and the abutment surface are configured and arranged against each other, that an excitation alternating field can be coupled into the piezoelectric layer by an electrical control of the electrode layers, the thin film resonator due to a coupled into the piezoelectric layer excitation alternating field to a resonant oscillation with a resonance frequency f R is excitable and the resonance frequency f R from a dependent attached to the attachment surface amount of the substance is ngig. The device is characterized in that at least one electrical insulation layer for electrically insulating the electrode layer is arranged directly on a side of at least one of the electrode layers facing away from the piezoelectric layer. Particularly advantageous is the combination of aluminum electrode layer and silicon dioxide insulating layer. This results in a relatively high mass sensitivity. Use the device ... |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102016205293-A1 |
priorityDate | 2008-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.