http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102008043422-B3

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filingDate 2008-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2010-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2010-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber DE-102008043422-B3
titleOfInvention Process for the purification of low molecular weight hydridosilanes
abstract The present invention relates to a process for the purification of low molecular weight hydridosilane solutions in which a solution to be purified comprising a) at least one low molecular weight hydridosilane, b) at least one solvent and c) at least one impurity selected from the group of compounds having at least 20 Si atoms and / or the group of homogeneous catalyst systems are subjected to a cross-flow membrane process with at least one membrane separation step using a permeation membrane.
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