http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102008036381-B3

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publicationDate 2010-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber DE-102008036381-B3
titleOfInvention Al2O3 ceramic diaphragm for a pressure sensor and pressure sensor with such a diaphragm
abstract A method for producing an elastic deformation body made of an Al 2 O 3 ceramic uses a high-purity alumina having at most 2,000 ppm MgO, at most 200 ppm inorganic impurities, a specific surface area of at least 10 m 2 / g, an average grain size of at most 0.3 a homogeneous mixture is produced with the alumina and additives via aqueous treatment, from which a compressible spray granulate is produced, which is shaped by means of a uniaxial pressing process into a homogeneous green body which is subjected to a sintering process, the resulting elastic deformation body having a bending stress σ c , whose distribution F (σ c ) is given by the Weibull parameters σ 0 ≧ 800 MPa and m ≧ 24, with an average grain size of the sintered material of not more than 2 μm, and wherein the sintered material of the deformation body has a Density of not less than 3.98 g / m 2 .
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