http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102008019692-B4
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7e01efab2d28b61421433f277421059f |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2200-0689 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-07 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2300-069 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0214 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0315 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2300-0896 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00206 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L3-502707 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01L3-00 |
| filingDate | 2008-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68eae604c5d2c547417979b206e20dd4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc5eb3276fb94cd56eaa1b5c13b7a9d7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28c7098f9527218b7d5f804618888218 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_815566f047ffc8f2622c8ab7ca64206a |
| publicationDate | 2010-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-102008019692-B4 |
| titleOfInvention | Method for integrating a polymer functional component in a silicon microsystem |
| abstract | Method for integrating at least one polymer functional component (3) into a silicon microsystem (1) comprising the following steps: Providing a silicon microsystem (1) provided with trenches, channels, functional structures and fluid connections (4); • providing at least one polymer functional component (3) which is to be integrated into the silicon microsystem (1); • etching at least one preferably two-stage opening on the top and / or bottom of the silicon microsystem (1), whose dimensions correspond to the dimensions of the at least one polymer functional component (3); Generating needle-like nano-objects (5) in a contact region (6) located in the at least one opening between the silicon microsystem (1) and the at least one polymer functional component (3) to be integrated; • fitting of the at least one polymer functional component (3) into the at least associated opening of the silicon microsystem (1) and • Establishing a connection between the at least one polymer functional component (3) and the silicon microsystem (1) in the contact region (6) under the action of pressure and temperature. |
| priorityDate | 2008-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.