abstract |
A method for producing a nanowire structural element (1) with a nanowire array (35) arranged between two cover layers (26a, 26b) for forming a columnar cavity structure (42) penetrated by the nanowires (34), comprising: (a) providing a template film (12), (b) application of a first, two-dimensionally closed, electrically conductive cover layer (26a) on a first side (12a) of the template film (12), (c) generating a large number of nanopores (32) in the template film (12), (d1) producing nanowires (34) in the nanopores (32) by filling the nanopores (32) by means of electrochemical deposition of an electrically conductive material, the nanowires (34) within the nanopores (32) on the first cover layer (26a ) grow up, (d2) creating a second, two-dimensionally closed cover layer (26b) on the second side (12b) of the template film (12), so that a sandwich-like arrangement of the two cover layers (26a, 26b) and the template film (34) penetrated by the nanowires (34) 12) arises, (e) Exposing the structured cavity (42) between the two cover layers (26a, 26b) by dissolving the template film (12) and removing the dissolved template material between the two cover layers (26a, 26b), the two cover layers (26a, 26b) remain. |