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filingDate 2008-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2009-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber DE-102008015270-A1
titleOfInvention Manufacturing method of a conductive layer for an integrated circuit
abstract The invention relates to a manufacturing method of a conductive layer for an integrated circuit, wherein an oxide, a nitride or an oxynitride of a first metal are deposited on the surface by means of a first vapor deposition method and a second metal by means of a second vapor deposition method.
priorityDate 2008-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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