| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0866
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0858
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-085 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0841 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-08 |
| filingDate |
2008-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2011-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55be5cda3622440f77a7d15cb0ef5d66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a685cf508f690b85bf511db8bb62aaf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_999fac2e26b1f5b3cdf7499c31c5d451
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5bec23360bd6e750d52c867af9a859b9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c1176790a88ea7fcb3180a1e3947c01 |
| publicationDate |
2011-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-102008012825-B4 |
| titleOfInvention |
Micromechanical device with tilted electrodes |
| abstract |
Micromechanical component, having the following features: a micromechanical functional structure (1) which is deflectable about a main axis (13) from a rest position; a movable electrode (3) fixed to the micromechanical functional structure (1); a fixed electrode (4); and Suspensions (6a, 6b) for the fixed electrode (4), which define a tilting axis (10), wherein the fixed electrode (4) in the manufacture of the device about the Verkippungsachse (10) relative to the movable electrode (3) in the rest position is tiltable and remains in this position, and wherein the tilting axis (10) is adjacent to the major axis (13) or is identical to the major axis (13), the tilting axis (10) adjacent to the major axis being located closer to the major axis (13) than at a free end of the movable electrode (3) fixed to the micromechanical functional structure (1). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020173919-A2 |
| priorityDate |
2007-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |