http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102007058455-B4
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36f8253f3d0d59bcd9259217d4385d10 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66575 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1079 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26506 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26513 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26566 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2658 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-335 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-772 |
| filingDate | 2007-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f918bfde8e5cf0f8252932c72cd2c58e |
| publicationDate | 2017-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-102007058455-B4 |
| titleOfInvention | Method for producing a semiconductor element |
| abstract | Method for producing a semiconductor element in a substrate, in which: Carbon ions are implanted into the substrate, thereby forming a plurality of carbide precipitates in the substrate; subsequently, pre-amorphizing ions are implanted into the substrate, whereby self-interstitial defects are formed in the substrate and the substrate is partially pre-amorphized; Doping atoms are implanted into at least a portion of an amorphous region of the substrate formed by the partial pre-amorphization; while heating the substrate, eliminating at least a part of the self-interstitial defects by means of the carbide precipitates; and the semiconductor element is formed using the doping atoms. |
| priorityDate | 2006-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.