http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102006046453-B4
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36333273e27f0db23ddddbf80ba79ba7 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-111 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-111 |
| filingDate | 2006-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fee656cdfd4e1cfc97b65693288e942d |
| publicationDate | 2022-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-102006046453-B4 |
| titleOfInvention | TARC COATING MATERIAL AND IMMERSION LITHOGRAPHY PROCESS |
| abstract | A coating material (130) disposed over a photosensitive layer (120) and for use during an immersion lithography process, the coating material comprising: - an acid (134) capable of neutralizing a basic quencher (124) from the photosensitive layer (120); and - a polymer (132) that is a carrier of the acid and is insoluble to an immersion liquid, including deionized water, used in the immersion lithography process, the acid (134) being mixed with the polymer (132) and not chemically bound to the polymer (132) such that the quencher (124) is inactivated and the mobility of the quencher (124) is reduced, the coating material (130) having a pH below 5. |
| priorityDate | 2005-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 56.