http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102006035485-B4

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publicationDate 2010-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber DE-102006035485-B4
titleOfInvention Method for producing a semiconductor device
abstract A method of manufacturing a semiconductor device (100), the method comprising: Growing a Group III nitride-based semiconductor crystal (10) on a substrate (11); an electrode forming step of forming metal-layered electrodes (13) having an island-like structure on a surface of a semiconductor crystal (10) grown on a crystal growth substrate (11), the surface facing the surface facing the crystal growth substrate so that each electrode is provided in a region which corresponds to a semiconductor device chip (100); a step of bonding the electrodes to an electrically conductive substrate, bonding the carrier substrate (20), to support the crystalline semiconductor by using a conductive first adhesive (30); a step of filling a second resin-containing adhesive (40) into spaces (30) formed between the semiconductor crystal and the support substrate at intervals where the support substrate is to be separated into individual chips; a laser removal step of removing the ...
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