http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102006003845-B3
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ddcb273a108a5d8472b335280098e06 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0422 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-02466 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02031 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-175 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-036 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-22 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-15 |
| filingDate | 2006-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2007-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_61b6952749691d35c4f8ee0a62ce1903 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cfac4ed2d44b21bbf21db97ba6f685d0 |
| publicationDate | 2007-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-102006003845-B3 |
| titleOfInvention | Titanium dioxide dielectric interlayer piezoacoustic thin film resonator, method of making the thin film resonator, and use of the thin film resonator |
| abstract | ThenThe invention relates to a piezoacoustic thin film resonator (1) comprisingna lower electrode layer (5) arranged on a substrate (3),nan upper electrode layer (6) and one between the electrode layersnarranged piezoceramic layer (4) with piezoceramic material.nThe thin-film resonatornis characterized in that between the piezoceramic layernand the lower electrode layer, a dielectric interlayern(4) is arranged with titanium dioxide and the titanium dioxide of the intermediate layernoxidized titanium of the lower electrode layer is. It will alsona method for producing the thin-film resonator with the followingnProcedures indicated: a) providing the lower electrode layernon a substrate having an electrode surface with elemental titanium,nb) at least partially oxidizing the titanium surface electrode to titania,nwherein the intermediate layer is formed with titanium dioxide, c) arrangingnthe piezoceramic layer on the intermediate layer with titanium dioxidenand d) arranging the upper electrode layer on the piezoceramic layer.nThe thus obtained, amorphous or polycrystalline intermediate layernTitanium dioxide facilitates a tilted growth of the polycrystallinenPiezoceramic layer. The result is a thin-film resonator, which leads to shear thickness vibrationsncan be stimulated. Use finds piezoacoustic thin-film resonatornas a biosensor in the detection of a substance of a fluid (13),nin particular a ... |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017149516-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102016205293-A1 |
| priorityDate | 2006-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 35.