http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102005043037-B4
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ddcb273a108a5d8472b335280098e06 |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0426 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0423 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-02881 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0256 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02102 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-036 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-17 |
filingDate | 2005-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2009-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cfac4ed2d44b21bbf21db97ba6f685d0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc385b76fd6a6c28ec53410f5de85d6f |
publicationDate | 2009-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | DE-102005043037-B4 |
titleOfInvention | Device with piezoacoustic resonator element, method for its production and method for outputting a signal as a function of a resonant frequency |
abstract | Device comprising at least one piezoacoustic resonator element (2) with a piezoelectric layer (32) and two electrodes electrically contacted with the piezoelectric layer (32), wherein the piezoacoustic resonator element (2) is such that by applying a voltage to the piezoelectric layer ( 32) is excited via the electrodes an acoustic thickness vibration of the piezoelectric layer (32) having a resonant frequency, wherein an integrated with the piezoacoustic resonator element (2) formed temperature detecting means (3) is provided, which comprises a formed as a thin layer measuring element, the temperature detection device (3) and the piezoacoustic resonator element (2) are formed on a common carrier substrate (35) and an electrode of the resonator element (2) and the temperature detection device (3) are arranged as layers on the carrier substrate (35). |
priorityDate | 2005-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.