http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102005023872-B4
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fdad00677b9268c26e005a9e03a7b9dd |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2223-076 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-223 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01T1-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-223 |
| filingDate | 2005-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2009-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_701dbb2ca74d0ab5e39f5a7a66924ec2 |
| publicationDate | 2009-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-102005023872-B4 |
| titleOfInvention | Total reflection X-ray fluorescence analysis method |
| abstract | Total reflection X-ray fluorescence analysis method, comprising: exposing a semiconductor substrate (2) to an acidic vapor (56); tracing and collecting an impurity on an area of the semiconductor substrate (2) exposed to the acidic vapor (56) with an acidic solution (7); moving the acidic solution (7) used in the trailing and collecting to a substrate (72) having a mirror surface; concentrating and drying the acidic solution (7) on the substrate (72) to change the acidic solution (7) into a concentrated and dried object (9); changing the concentrated and dried object (9) into a particle-like concentrated object (9a) using an acid (56); and analyzing the particle-like concentrated object (9a) using a total reflection X-ray fluorescence analyzer (40). |
| priorityDate | 2004-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 43.