http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102005015334-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9f52bca70870b9b49159f12cba370b34 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-48091 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2877 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2865 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-673 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2005-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae7b8e6687d578b7c2d87083bc639e62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_780d7f808f3a91d62aad4ebd99ff8361 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b80fdb1ae5821a4efbbf9793cb46caa |
| publicationDate | 2006-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-102005015334-A1 |
| titleOfInvention | Prober for testing substrates at temperatures in the range of the boiling point of helium |
| abstract | ThenThe invention relates to a prober in which substrates at temperaturesnbe tested in the range of the boiling point of helium. The prober pointsna Chuck, which by means of a Chuck drive between anTray and a working area in the Prober movable and thermalnis decoupled from the Chuck drive, as well as retaining means for fixationna substrate carrier,nwhich receives a test substrate. The invention of the underlyingnTask to represent a Prober, which at minimumnCoolant requirement,nin particular helium, the universal test of various test substratesnto very low temperatures and at the same time the mobility of thenSubstrate recording from a recording into a work area allowed,nis characterized according to the inventionnsolved,nthat the Prober a chillern(Refrigerator) with a cold head and the substrate carrier ansecond chuck, with a second receiving surface fornRecording and for coolingna test substrate, wherein the second chuck thermally differs from the first chucknChuck is decoupled and the second chuck over good heat conducting lanyardnconnected to the cold head. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102009030471-B4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102009030471-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3734302-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8680879-B2 |
| priorityDate | 2005-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23987 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577374 |
Total number of triples: 26.