| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3a62c92e56568bd104089aac22ca487b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76847
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-617 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-12 |
| filingDate |
2005-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2007-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b3ca238ee4179e4aa811f70201fe547
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60f96ac871b33082b133cf6a43b1606a |
| publicationDate |
2007-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-102005014748-B4 |
| titleOfInvention |
Technique for electrochemical deposition of a chemical order alloy |
| abstract |
Plating method for a damascene technique for semiconductor devices with: contacting a structured surface to be coated with an electrolyte, the electrolyte having a first consumable electrode comprising a first metal, and a second consumable electrode having a second metal different from the first metal in contact; Generating a first current by means of the electrolyte between the first consumable electrode and the surface; and Generating a second current by means of the electrolyte between the second consumable electrode and the surface |
| priorityDate |
2005-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |