| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f679a7e16a87f7aedef8debde5276c19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G21K1-087 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K1-087
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-147
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J3-30 |
| filingDate |
2005-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab70ef665de042479192a306a0eb09d9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df111f8c8925c19c9f26659865d60f2d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51e4c1297421cd1a71c4c83e2cfcf0c3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c0065d94f27b1f5076a4e1c721ab708
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7279a9adc006f567d8dcad209fd15cad
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c9b9a18abd3fc0fca028d0b4e3d337c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0dd3c3015b81a4a5f0e875768bcfafd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7fecd6539f71d803e0d9ec01ef29acfc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae01f50509c6b6f7f2fb6265bdfbdb9c |
| publicationDate |
2006-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-102005005801-A1 |
| titleOfInvention |
Electrostatic deflection system for corpuscular radiation |
| abstract |
ThenThe invention relates to electrostatic deflection systems for corpuscular beams,nespecially fornMicro- and nanostructured applications in lithography equipmentnor measuring devicesncan be used. According to the askednTask should be the individual electrodes of such a deflection systemnpermanently a very accurate axial symmetric arrangement to each othernhave and maintain. In the electrostatic deflection system according to the inventionnare rod-shapednElectrodes in axial symmetric arrangement in a hollow insidencarriernheld by a corpuscular beam can be directed.nThe carriernis at least two and a maximum of four interconnectablensupport elementsneducated. |
| priorityDate |
2005-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |