Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fdd8e8537bf4fcab81030cb3b1535c22 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-8828 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-8822 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-8825 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-841 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-882 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-245 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-026 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L45-00 |
filingDate |
2005-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2011-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc6e189c183f2007a5b84726c137487e |
publicationDate |
2011-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
DE-102005005325-B4 |
titleOfInvention |
Method for producing a resistively switching non-volatile memory cell |
abstract |
A method of fabricating a resistive switching memory cell, comprising the steps of: a) depositing a first electrode, b) applying a layer of a chalcogenide compound to the first electrode, in which c) in a step following step b, first a metallic doping layer of silver or copper is applied to the layer of the chalcogenide compound deposited in step b, and d) after step c, a silver or copper diffusion from the doping layer applied in step c in a noble gas plasma into the layer of the chalcogenide compound is carried out by a back sputtering method. |
priorityDate |
2005-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |