| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5397fc5ff75ee49a454558b68b36baa |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K77-111 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1292
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78603
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66757 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L49-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-84 |
| filingDate |
2005-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0eab2fc695863adae2b4c68962fd7def
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a66ec52bc4ac4c146187e289a5f8d65d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5337cea7d71bf6eee91de77633f9f7ec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d22e0995f9bb9904a06486c98e89661 |
| publicationDate |
2010-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-102005001168-B4 |
| titleOfInvention |
A method and system for producing a plurality of thin-film devices |
| abstract |
Method for producing a plurality of thin-film devices, comprising the following steps: Providing (110) a flexible substrate (401; 515; 1115); and Using (120) a self-aligned lithographic printing operation to form the plurality of thin-film devices (410) on the flexible substrate (401; 515; 1115), the self-aligned lithographic printing process comprising the steps of: Depositing (121) a layer sequence (402-405; 511-514; 1111-1114) of a plurality of materials over the flexible substrate (401; 515; 1115); Forming (122) a three-dimensional mask (510; 1110) over the layer sequence (402-405; 511-514; 1111-1114), the three-dimensional mask (510; 1110) having a plurality of sections of different thicknesses; and Patterning (123) the layer sequence (402-405; 511-514; 1111-1114) according to the desired characteristics of the plurality of thin film devices (410) using the three-dimensional mask (510; 1110), wherein the layer sequence (402-405; 511-514; 1111-1114) is patterned such that a part of the three-dimensional mask (510; 1110) remains in the finished thin-film device. |
| priorityDate |
2004-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |