| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c17c70d7e12e76545f08868636bfbe4e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f77117d9ddc662f8ef43421008272768 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C8-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-622
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-46 |
| filingDate |
2004-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d1500c963afacc3d39d688ce23523be5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8fb550821ed7d92ca79d386849820ea8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_57d888cdc07092a12f87d6a7fdd39321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_435a50de38c72a04fb215c320c5cb7bc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_57ca65a8ca101cc09b2a70b9c33211f7 |
| publicationDate |
2006-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-102004032635-A1 |
| titleOfInvention |
Process for producing a titanium-suboxide-based coating material, correspondingly produced coating material and sputtering target provided therewith |
| abstract |
A manufacturing method for a titanium suboxide-based coating material comprises the following method steps: - Providing a titanium suboxide base material and - Further processing of the titanium suboxide base material under oxidizing conditions for in situ formation of a finely dispersed titanium dioxide content in the ceramic titanium suboxide base material. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102013115005-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102011116062-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102012107499-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102013115005-A1 |
| priorityDate |
2004-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |