http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102004014953-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44ff3005508304394801e265e503b811 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C19-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B49-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B49-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C19-00 |
| filingDate | 2004-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e723b4110de0db2604150fcb545e8232 |
| publicationDate | 2004-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-102004014953-A1 |
| titleOfInvention | Method of manufacturing a glass substrate for a mask blank and method of manufacturing a mask blank |
| abstract | OnnThe method for producing a glass substrate for a mask blank hasnfollowing steps: measuring a convex / concave profile of ansurfacenof the glass substrate, controlling the flatness of the surface of thenGlass substrate to a value that is not greater than a predetermined reference valuenby setting the degree of convexity one on the surface of the glass substratenexisting convex section based on a profile measurement stepnobtained measurement resultnand performingnlocal machining on the convex section under machining conditions,nthat of the degree of convexityndepend,nand after the flatness control step, polishing the surface of thenGlass substrate that has undergone local processingnthe effect of a processing fluid,nthe between the surfacenof the glass substrate and a surface of a polishing tool withoutndirect touchninserted in betweennis. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9598305-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106002529-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106002529-A |
| priorityDate | 2003-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 52.