http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102004013478-B4

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filingDate 2004-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2010-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1956a9e35d102302e98b8d8e1c12d4b5
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publicationDate 2010-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber DE-102004013478-B4
titleOfInvention Method for producing a bipolar transistor with improved base connection
abstract A method of fabricating a high doped extrinsic base (EB) bipolar transistor, in which A semiconductor layer (BS) of semiconductor material is provided on a semiconductor substrate (HLS), A dielectric layer (DS) is produced on the base layer (BS), Using a mask covering an intrinsic base (IB) region, introducing BF 2 for doping into the dielectric layer (DS) over an extrinsic base (EB) region; and A diffusion of the dopant from the dielectric layer (DS) into the region of the base layer (BS) provided for the extrinsic base (EB) is effected in a controlled thermal step.
priorityDate 2004-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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