http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10158128-A1
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d16e4505dadc6f48bd6ff034013c2390 |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K1-0346 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S428-901 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31721 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G73-00 |
classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K1-03 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G73-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 |
filingDate | 2001-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28d193df0df61278e54f5e4a92875338 |
publicationDate | 2003-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | DE-10158128-A1 |
titleOfInvention | Method and device for producing high density polyimide layers (HPI) |
abstract | The present invention relates to a method for producing high-density polyimic (HPI) layers and their device. The device comprises raw material supplying means, a vacuum chamber, an energy supply device, a substrate and a hardened solidified polymer. The above compounds represent the manufacturing equipment that the monomer with the CONH bond or copolymer uses as raw materials to extract the unsaturated C = N bond by heat, electrodes, light, radiation or ions as energy under low pressure conditions so that the Hydrogen can extract the non-solidified HPI film from the electronic radical covalent polymers in a vacuum and can convert the structure into a solidified HPI layer by means of heat or light. Using the method according to the invention, an original HPI layer, which is not easy to produce as a layer, can be produced in a simple manner in the form of a layer of an HPI polymer on the substrate. |
priorityDate | 2001-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.