| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36f8253f3d0d59bcd9259217d4385d10 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-038 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02192
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66181
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-51 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-334
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-51
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate |
2001-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0a17d58f993e89297035bd776a09742
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb08f72e58cbb3ca82f0c751ded1c239
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8974304fc6392b9b9be48889f53e8a63
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_071591c948e17859f94f8c43a59291ea |
| publicationDate |
2003-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-10156932-A1 |
| titleOfInvention |
Process for the deposition of thin praseodymium oxide layers using the ALD / CVD process |
| abstract |
The invention relates to a method for producing thin praseodymium oxide layers as a dielectric in an electronic component of a semiconductor device. The praseodymium oxide is deposited by a CVD process or an ALD process. The method allows the deposition of praseodymium layers on substrates with high topography. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10340202-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7410670-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102004012856-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7528434-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006005637-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7732308-B2 |
| priorityDate |
2001-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |