http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10155452-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d7576285d411d00c697e07270d2814a
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76281
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76283
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76286
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76264
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
filingDate 2001-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_740a538c0821544a080398e7c50f4898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7ca1397a976e8dbe9eca4d9796898ff
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11899ccb0745cfd776f526204707c8b2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8c11d8a5b8c76c3cbae09daa77f3fd64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b68a40f1213cb80dc7358cc82f1038f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58f4fe19212a34ac2727eb8431fbb462
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e75f857d668c863ad50aa9321bd574d
publicationDate 2002-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber DE-10155452-A1
titleOfInvention Semiconductor device and manufacturing method of the semiconductor device
abstract A semiconductor device is provided which can prevent disadvantages caused by metal contamination and a method of manufacturing such a semiconductor device. A region (NR) and a region (PR) are delimited by a trench isolation oxide film (ST21), a polysilicon film (PS21) is selectively provided on the trench isolation oxide film (ST21), a silicon layer (S22) is provided on the polysilicon film (PS21), and a sidewall spacer layer (SW2) is provided on a side surface of the polysilicon film (PS21). The polysilicon film (PS21) is provided at a position corresponding to a top of a PN junction portion (JP) of a P-well region (WR11) and an N-well region (WR12) in an SOI layer (3) over the two well regions.
priorityDate 2000-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID39353
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14917
http://rdf.ncbi.nlm.nih.gov/pubchem/taxonomy/TAXID39353
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579069
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578708
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457280313

Total number of triples: 39.