http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10150291-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36f8253f3d0d59bcd9259217d4385d10 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06738 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06761 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R3-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067 |
| filingDate | 2001-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e47a30940942acfd366979df914d3af3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c03f2876f1212bfc53464b0a207e147a |
| publicationDate | 2003-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-10150291-A1 |
| titleOfInvention | Probe needle for testing semiconductor chips and process for their manufacture |
| abstract | The invention relates to a probe needle for testing semiconductor chips, which is fastened at one end in a holder and has a contact tip at its free end, and a method for producing a probe needle for testing semiconductor chips with a plurality of processing steps for forming the probe needle The task is to increase the service life of probe needles. This is achieved in that the probe needle is provided, at least on the surface of the contact tip, with a layer of a chemically inert, electrically conductive material that is hard relative to the material of contact surfaces of the semiconductor chips. |
| priorityDate | 2001-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.