| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-16 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-02 |
| filingDate |
2001-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2002-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f0ac5625c89b2bb450cec570ac0bcb1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3fb2898e8037406773c36ee3937594bd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_951292ab895f2029250d16a613003075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abebd53b3e21dc087f40e1ed3168434f |
| publicationDate |
2002-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-10129313-C1 |
| titleOfInvention |
Sputtering method and apparatus for coating and / or surface treatment of substrates |
| abstract |
The invention relates to a sputtering process for coating and surface treatment of substrates by means of a structured electrode mask, which is provided with openings and is arranged on the substrate. Likewise, the invention relates to a device for coating and surface treatment of substrates. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10318566-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10318566-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8308921-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112210763-A |
| priorityDate |
2001-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |