http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10126152-A1

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filingDate 2001-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_547220338ba7b310a291baca1fae9bb8
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publicationDate 2002-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber DE-10126152-A1
titleOfInvention Spatially resolved ellipsometry method for the quantitative and / or qualitative determination of sample changes, biochip and measuring arrangement
abstract A spatially resolved ellipsometry method for the quantitative and / or qualitative determination of sample changes is described. The sample is on a sample carrier provided with at least one metal layer. The parameters PSI and DELTA are determined by means of the ellipsometric measurement, the angle of incidence and / or the frequency of the electromagnetic radiation used for the ellipsometric measurements being set such that a damped surface plasmon resonance is excited in the metal layer. The detection sensitivity (deltacosDELTA) / (unit of sample change) is set via the thickness of the metal layer. The electromagnetic radiation is radiated in a flat manner on the side of the sample carrier facing away from the sample and at least one angle of incidence and at least one frequency, at least two temporally staggered, simultaneous, spatially resolved ellipsometric measurements are carried out on the sample / the samples and at least the associated DELTA or cosDELTA values evaluated to determine the sample change. The invention also describes a biochip with a base plate provided with at least one metal layer and a measuring arrangement which comprises an ellipsometer with a radiation source (2), a polarizer (6), an analyzer (7) and a detector (9) which is an imaging sensor. having. In the beam path in front of and behind the coupling and decoupling device (20) for the biochip (40), a lens system (5, ...
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