| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36f8253f3d0d59bcd9259217d4385d10 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B53-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B53-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-55 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-11507
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8246
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-11502
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-115 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2001-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ee98bf9bb57a66f69d44321d1450ade
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_47af000fb7872e971063e52aa85ff579
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_30d7330b675c1cee7f9ffef4471945d0 |
| publicationDate |
2002-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-10116875-A1 |
| titleOfInvention |
Method for producing an integrated ferroelectric memory |
| abstract |
The invention relates to a method for producing an integrated ferroelectric memory according to the stack-cell principle, wherein transistors are formed on a wafer, then a first intermediate oxide (2) is deposited, and the ferroelectric capacitor modules (1), which are produced with, are deposited on this first intermediate oxide its lower electrode (4) is connected by an underlying electrically conductive plug (8) to a corresponding transistor electrode of a selection transistor, the ferroelectric capacitor modules (1) being produced over the whole area and subsequently structured in one step, and then being structured over the structured ferroelectric capacitors ( 1) a hydrogen diffusion barrier (10) is deposited. |
| priorityDate |
2001-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |