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filingDate 2001-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2004-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber DE-10113778-B4
titleOfInvention Surface wave liquid sensor
abstract Surface wave sensor for measuring physical quantities of liquids (7) with the following features: a piezoelectric substrate (1); a first electrode structure (2a) and a second electrode structure (2b) which are arranged on a surface of the piezoelectric substrate (1) at a distance from one another, the first electrode structure (2a) generating a surface wave and the second electrode structure (2b) receiving the same; an insulating intermediate layer (8, 11) which has an exposed area which is arranged at least over areas of the first electrode structure (2a) and the second electrode structure (2b); a conductor structure (9; 12) which is arranged on the piezoelectric substrate (1) and is spaced apart from the first electrode structure (2a) and from the second electrode structure (2b) via the exposed region of the insulating intermediate layer (8) the conductor structure (9; 12) suppresses electrical coupling from the first electrode structure (2a) and from the second electrode structure (2b) and from the surface waves to the liquid (7) to be measured.
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