| abstract |
The invention relates to a material sensor, in particular a gas sensor, comprising DOLLAR A - a substrate or a carrier layer, DOLLAR A - a capacitor structure applied to the substrate or the carrier layer with two electrodes at different potentials, DOLLAR A - a sensor functional layer in contact with the capacitor structure , DOLLAR A - an electrical resistor for temperature measurement or sensor heating. DOLLAR A According to the invention, the electrical resistance for temperature measurement or sensor heating also forms one of the electrodes of the capacitor structure. |