| abstract |
A method of manufacturing a membrane sensor (40), comprising: a) providing a substrate (200, 220, 530), b) producing a depression (216) in the substrate (200, 220, 530), c) introducing conductive material (250, 532) into the recess (216); d) connecting a conductor track (76a, 252, 536) to the conductive material (250, 532); e) attaching a membrane (72a) to support the conductive material (250, 532); and f) removing the substrate (200, 220, 530) from the conductive material (250, 532). |