| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aa0f2776bcc27d5099aa97f3212e1681 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67092 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28D5-0076
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B7-0416
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6704
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B28D5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05B7-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2000-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1bcdcdc619519f919459d9971b920d25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9754cd97db2c6905dd56bb8830c6ea5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_41a861f4be5227e811a45573af226c02 |
| publicationDate |
2001-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-10019472-A1 |
| titleOfInvention |
Cleaning device |
| abstract |
A cleaning device comprises nozzle devices which have an ejection opening, a cleaning liquid path which is in communication with the ejection opening, and a compressed gas path which is in communication with the ejection opening. The cleaning device further includes cleaning liquid supply means for supplying a cleaning liquid to the cleaning liquid path and pressurized gas supply means for supplying a pressurized gas to the pressurized gas path. The pressurized gas is discharged from the ejection opening through the pressurized gas path, while a cleaning liquid is ejected from the ejection opening through the cleaning liquid path. |
| priorityDate |
1999-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |