http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10015255-B4
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f6c13a34b18066b5e97c8f0114edf5d0 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2602-42 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03G7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C323-47 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C251-62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C317-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-65 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D333-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D319-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C381-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L101-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L101-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C251-62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J3-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-33 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-75 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-73 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-65 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D319-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C317-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C323-47 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C381-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C323-64 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D333-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-74 |
| filingDate | 2000-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_500874e28fa18a7162b3d76485a775fd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_121b77bec6d1487041e44f7b487d6cd3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_525ca3d8a81b2095653f22f499bcf6a2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f0fb75275dbe36049ce813c6d961c2dc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dab6a70dd11837ebd689949cd080fbf1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b592f067a4927af1837f1512170ad004 |
| publicationDate | 2020-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-10015255-B4 |
| titleOfInvention | Process for the preparation of oxime derivatives and their use as latent acids in chemically amplified photoresist compositions, and process for the production of a photoresist |
| abstract | A chemically amplified photoresist composition comprising: (a) a compound that cures upon exposure to an acid or a compound whose solubility is increased by exposure to an acid; and (b) at least one compound of the formulas I, II or III as the photosensitive acid donor wherein R 1 is hydrogen, unsubstituted C 1 -C 12 alkyl, C 1 -C 12 alkyl which is substituted by C 3 -C 30 cycloalkyl; or R 1 C 3 -C 30 cycloalkyl, C 1 -C 8 haloalkyl, C 2 -C 12 alkenyl, C 4 -C 8 cycloalkenyl, C 6 -C 12 bicycloalkenyl, camphoryl or Phenyl which is unsubstituted or substituted by one or more of the radicals phenyl-C 1 -C 3 -alkyl, halogen, OR 4 , NR 5 R 6 , SR 7 , SOR 7 and / or SO 2 R 7 , where optionally form the substituents OR 4 , SR 7 and NR 5 R 6 via the radicals R 4 , R 5 , R 6 and / or R 7 with further substituents on the phenyl ring or with one of the carbon atoms of the phenyl ring 5- or 6-membered rings; or R 1 is naphthyl, anthracyl or phenanthryl, the radicals naphthyl, anthracyl and phenanthryl being substituted by OR 4 , NR 5 R 6 , SR 7 , SOR 7 , and / or SO 2 R 7 , where the substituents OR 4 , SR 7 and NR 5 R 6 via the radicals R 4 , R 5 , R 6 and / or R 7 with further substituents on the naphthyl, anthracyl or phenanthryl ring or with one of the carbon atoms of the naphthyl, anthracyl or phenanthryl ring 5- or Form 6-membered rings; or R 1 denotes a heteroaryl radical which is substituted by OR 4 , NR 5 R 6 , SR 7 , SOR 7 and / or SO 2 R 7 , where the substituents OR 4 , SR 7 and NR 5 R 6 may be substituted via the radicals R 4 , R 5 , R 6 and / or R 7 with further substituents on the heteroaryl ring or with one of the carbon atoms of the heteroaryl ring form 5- or 6-membered rings; with the exception of hydrogen, all of the radicals R 1 can additionally be substituted by a group having an —OC bond or an —O — Si bond which is cleaved on exposure to an acid; R ' 1 phenylene, naphthylene, Means diphenylene or oxydiphenylene, these radicals being unsubstituted or substituted by C 1 -C 12 alkyl; or R ' 1 C 1 -C 12 alkylene or means; A is -O-, -S-, -NR 4 -, -O (CO) -, -S (CO) -, -NR 4 (CO) -, -SO-, -SO 2 - or -OSO 2 - Has; A 1 is C 1 -C 12 alkylene or C 2 -C 12 alkylene which is interrupted by one or more -O radicals; R 2 represents halogen or C 1 -C 10 haloalkyl; R 3 is C 1 -C 18 alkylsulfonyl, camphorylsulfonyl, phenyl-C 1 -C 3 alkylsulfonyl, C 3 -C 12 cycloalkylsulfonyl, phenylsulfonyl, naphthylsulfonyl, anthracylsulfonyl or phenanthrylsulfonyl, the groups being cycloalkyl, phenyl, naphthyl, naphthyl and naphthyl Phenanthryl of the radicals C 3 -C 12 -cycloalkylsulfonyl, phenyl-C 1 -C 3 -alkylsulfonyl, phenylsulfonyl, naphthylsulfonyl, anthracylsulfonyl and phenanthrylsulfonyl, unsubstituted or by one or more of the radicals halogen, C 1 -C 4 -haloalkyl, CN, NO 2 , C 1 -C 16 alkyl, phenyl, C 1 -C 4 alkylthio, OR 4 , COOR 7 , C 1 -C 4 alkyl- (OC) O-, R 7 OSO 2 - and / or -NR 5 R 6 are substituted; or R 3 C 2 -C 6 haloalkanoyl, halobenzoyl or a group of the formula means; Y 1 , Y 2 and Y 3 are independently O or S; R ' 3 phenylenedisulfonyl, naphthylenedisulfonyl, Means diphenylenedisulfonyl or oxydiphenylenedisulfonyl, these radicals being unsubstituted or substituted by C 1 -C 12 alkyl; or R ' 3 is C 2 -C 12 alkylene disulfonyl; X represents halogen; R 4 is C 1 -C 18 alkyl which is substituted by C 2 -C 12 alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR 5 R 6 and / or C 1 -C 12 alkylsulfonyl; or R 4 is C 2 -C 18 alkyl which is interrupted by one or more -O radicals and which is unsubstituted or by phenyl, OH, C 1 -C 12 alkoxy, C 2 -C 12 alkoxycarbonyl, phenoxy , Phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR 5 R 6 , C 1 -C 12 alkylsulfonyl, phenylsulfonyl, (4-methylphenyl) sulfonyl and / or C 2 -C 6 alkanoyl; or R 4 is C 2 -C 18 alkanoyl which is unsubstituted or by phenyl, OH, C 1 -C 12 alkoxy, C 2 -C 12 alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR 5 R 6 , C 1 -C 12 alkylsulfonyl, phenylsulfonyl, (4-methylphenyl) sulfonyl and / or C 2 -C 6 alkanoyl is substituted; or R 4 is C 1 -C 18 alkylsulfonyl which is unsubstituted or by phenyl, OH, C 1 -C 12 alkoxy, C 2 -C 12 alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR 5 R 6 , C 1 -C 12 alkylsulfonyl, phenylsulfonyl, (4-methylphenyl) sulfonyl, and / or C 2 -C 6 alkanoyl; or R 4 is phenylsulfonyl or (4-methylphenyl) sulfonyl; R 5 and R 6 independently of one another are C 1 -C 18 -alkyl which is substituted by C 2 -C 12 -alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, phenylamino and / or phenylaminocarbonyl; or R 5 and R 6 are C 2 -C 18 alkyl which is interrupted by one or more -O radicals and is substituted by C 2 -C 12 alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, phenylamino and / or phenylaminocarbonyl is; or R 5 and R 6 are C 2 -C 18 alkanoyl which is unsubstituted or by phenyl, OH, C 1 -C 12 alkoxy, C 2 -C 12 alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, phenylamino, phenylaminocarbonyl , C 1 -C 12 alkylsulfonyl, phenylsulfonyl, (4-methylphenyl) sulfonyl, and / or C 2 -C 6 alkanoyl; or R 5 and R 6 are C 1 -C 18 alkylsulfonyl which is unsubstituted or by phenyl, OH, C 1 -C 12 alkoxy, C 2 -C 12 alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, phenylamino, phenylaminocarbonyl , C 1 -C 12 alkylsulfonyl, phenylsulfonyl, (4-methylphenyl) sulfonyl, and / or C 2 -C 6 alkanoyl; R 7 is C 1 -C 18 alkyl which is substituted by C 2 -C 12 alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR 5 R 6 and / or C 1 -C 12 alkylsulfonyl; or R 7 is C 2 -C 18 alkyl which is interrupted by one or more -O radicals and by C 2 -C 12 alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR 5 R 6 and / or C 1 -C 12 alkylsulfonyl is substituted; or R 7 is C 2 -C 18 alkanoyl which is unsubstituted or by phenyl, OH, C 1 -C 12 alkoxy, C 2 -C 12 alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR 5 R 6 , C 1 -C 12 alkylsulfonyl, phenylsulfonyl, (4-methylphenyl) sulfonyl, and / or C 2 -C 6 alkanoyl; or R 7 is C 1 -C 18 alkylsulfonyl which is unsubstituted or by phenyl, OH, C 1 -C 12 alkoxy, C 2 -C 12 alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR 5 R 6 , C 1 -C 12 alkylsulfonyl, phenylsulfonyl, (4-methylphenyl) sulfonyl, and / or C 2 -C 6 alkanoyl; or R 7 is phenylsulfonyl, or (4-methylphenyl) sulfonyl; R 8 , Rg and R 10 independently of one another are C 1 -C 6 alkyl which is unsubstituted or substituted by halogen; or R 8 , R 9 and R 10 are phenyl which is unsubstituted or substituted by C 1 -C 4 alkyl or halogen; or R 9 and R 10 together mean 1,2-phenylene or C 2 -C 6 alkylene which is unsubstituted or substituted by C 1 -C 4 alkyl or halogen. |
| priorityDate | 1999-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
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