| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36f8253f3d0d59bcd9259217d4385d10 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76838
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1608
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76888 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-16 |
| filingDate |
2000-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2001-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb51ecc6250cd828e37570304f15e190
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e081ab555664d591070c9d9d6722a17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74ce767632953a29117a592b955930c8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_39d33ac8b7cc1098c77504f5ebea6164 |
| publicationDate |
2001-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-10015213-C1 |
| titleOfInvention |
Process for metallizing at least one insulating layer of a component |
| abstract |
The invention relates to a method for metallizing at least one insulating layer of a component, wherein several levels of metallization are exposed by structuring and forming connections between the insulating layers. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10245928-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102005009072-B4 |
| priorityDate |
2000-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |