http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DD-282771-A5
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_394e1eac0f43a87fa452f9d345ba37b0 |
| filingDate | 1989-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e37e0d9a0e45d11c1e5abe249e8473c3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2151969403373c830431bbecfaae8003 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bbf6d5d6591e6f4700eb8fd99e67a00c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c3095d7e1f4f92045c2ad4bb890851b6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_61672a7ac35c09bc355e46cd6a670bab http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f84afc3496acdb5a9143cf638bd3a986 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_729e8606c8a07013526cbbb848e3d614 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9b8b482bbdfcf24d20da7d28214bb31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b114c87670853e2593b28bcf66525f88 |
| publicationDate | 1990-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DD-282771-A5 |
| titleOfInvention | METHOD FOR PRODUCING A CONTRAST COMPRESSIVE MATERIAL |
| abstract | The invention relates to a process for the preparation of a contrast-enhancing material which is used for the production of highly integrated microelectronic devices. The object and task of providing a contrast-enhancing material which can be prepared from simple starting materials with favorable application properties and adequate storage stability is achieved according to the invention by the contrast-enhancing material consisting of solvent, binder, photosensitive component and optionally further additives, as a photosensitive component a bisnitron the general structure is used, wherein R is an alkyl group, R 1 to R 5 is hydrogen, alkyl, alkoxy, aryl, aryloxy, halogen and / or nitrogen-containing substituents such as. B. represent nitro, cyano and acylamino groups or are part of carbo- or heterocyclic ring systems. Structural formula {contrast-enhancing material; microelectronic components; photosensitive component; Binder; Solvent; Resist layer; Exposure; Resist sensitivity; recrystallization; diazonium salts; Glyoxalbisnitrone} |
| priorityDate | 1989-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.