http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DD-280016-A3
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3bfedd8ba4800708cecfd357707f8f67 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01H1-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 1986-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0c294efcbef03768e4fcb7236ecd1f8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3df3c18df5d5035c446d51b34e8bba9a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_26f8e4f10090f59338ac6ae40b5db10a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e4e5a62d7d9de097a47906c1b4a685d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9a65ec782e952e1f12717dea7efba41d |
| publicationDate | 1990-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DD-280016-A3 |
| titleOfInvention | DEVICE FOR QUICKLY LOCKABLE CONTACTING OF DISK FAULT OBJECTS |
| abstract | The invention relates to a device for fast solvable contacting, in particular of semiconductor material disks for the statistical detection of their electrical parameters, which enables a reduction in the force of impact of the contact tip of the liquid contact column on the wafer surface at a high flow rate of the contact fluid in the direction of the wafer surface. This is achieved by the arrangement of a arranged in the Zufuehrungsleitung slippery and on the contact fluid body capable of having a duesenfoermige recess in the direction of the liquid, the flow rate of the contact fluid immediately before the formation of the free-standing Kontaktsaeule and their impact on the measuring point of the semiconductor material disc significantly reduced. |
| priorityDate | 1986-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.