| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_62b563909ed77d94afc3c237e0fbd935 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 |
| filingDate |
1988-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0c5e7ace41cc808b86b5e95fb5a75b65
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3209041f462b2ddafc69c4ea360063e7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_821302bd5ea1b3e5f0817ba66ac7d676
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_52adbe1848bf36248296f35f9a6b457e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b558ffe16f330ad72afe17d01f39240e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8c92ec7dc931a159b606738f7ea1cfb0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ccdfdc7225933642ca4e442a7bcca0e5 |
| publicationDate |
1989-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DD-271969-A1 |
| titleOfInvention |
CONTRAST AMPLIFIERS PHOTOCOPIER PAINT FOR LASER LITHOGRAPHY |
| abstract |
The invention relates to a photocopy lacquer to which a contrast-increasing agent has been added. The photocopying lacquer is suitable for excimer laser lithography. The additive according to the invention is a compound which switches optically in the nanosecond range with electronic excitation by means of a laser pulse. For a given exposure regime, the selection of the respective additive according to the invention takes place on the basis of its substance-specific characteristic data for the dynamics of the absorption behavior and the absorption cross section. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-4400975-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-4400975-C2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102006027356-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102006027356-A1 |
| priorityDate |
1988-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |