http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DD-268085-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3bfedd8ba4800708cecfd357707f8f67 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate | 1987-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcd53d4abea2f04da3ec602399b903c4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_52cc8d7a23f51ad3d32fa0ad035277b3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c161a7f91901a5a93e44cbf71222d405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23cdcea5d0d4a0bfaa3f5c639e26a3ac |
| publicationDate | 1989-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DD-268085-A1 |
| titleOfInvention | METHOD FOR PRODUCING STRUCTURED METAL CONTACTS ON III-V CONNECTOR SEMICONDUCTORS |
| abstract | The invention relates to a method for producing structured metal contacts on III-V compound semiconductors. The method is used to generate blocking or barrier-free geometrically sharp limited metallic single or multi-layer contacts to III-V compound semiconductors, which are used as active functional elements for microelectronic and optoelectronic devices. In microstructuring using the "lift-off process" known per se, auxiliary structure motifs are used which consist of a combination of a semiconductor-inherent oxide layer with a single-layered or multi-layered metal component. In a first process step, a mixed oxide in the semiconductor surface area is formed by anodic oxidation, in a second step this mixed oxide by annealing in O2 / N2 gas mixtures at 400C and annealing times between 1 min and 5 min in a mechanically solid, inherently structurable by chemical or physical processes semiconductors own Formed oxide layer and applied in a third step, the metal component of the auxiliary structure. |
| priorityDate | 1987-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.