http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DD-241144-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3bfedd8ba4800708cecfd357707f8f67 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-52 |
| filingDate | 1985-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a3667424a7573c5934372e5e211ed1c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d4078d61fb9589947c2fac007f6f747e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ea4bcdedf0ed26f88e4136e8d33d828 |
| publicationDate | 1986-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DD-241144-A1 |
| titleOfInvention | NEGATIVELY WORKING LIGHT-SENSITIVE MIXTURE |
| abstract | The object of the invention is to provide a negative-working photosensitive composition which has high sensitivity and good so-called "spectral tuneability" and leads to resist patterns having a high dimensional stability and etching resistance. The object is achieved in that the light-sensitive mixture composed of an azide compound, a polymeric binder, a known photoresist solvent and optionally further additives according to the invention contains, as binders, glycidyl-containing acrylate copolymers of the general formula I. Formula I |
| priorityDate | 1985-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.