http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DD-200174-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d8ef3f9c02a7e76d9811838bf941a785 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8fa1b29fc347f05a847a26f9c93aa788 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_350fd5e879837a06d53a2e75c7a089ef |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 |
| filingDate | 1981-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_221605e0026c1c84ab18e4bb940cb2c6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_98dcbcd546607e332fc64382244fc337 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10dd02e66e01d98961f9f907e41243ef |
| publicationDate | 1983-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DD-200174-A1 |
| titleOfInvention | METHOD FOR PRODUCING ELECTRON AND ROLE GENESIS |
| abstract | According to the object of the invention to provide positive and negative working, easily accessible polymeric electron or Roentgenresists to provide the development of the irradiated areas a comparatively low absorbed dose, a method according to the invention, according to which Methacrylsaeureeinheiten containing co- or Terpolymers are reacted before application to a substrate in bulk or in solution with saturated and / or unsaturated aliphatic and / or aromatic carboxylic acid chlorides or anhydrides. The reaction products containing anhydride groups are subsequently heated to 80 to 180 ° C. after application on a wafer to remove the solvent, then irradiated, the irradiated or unexposed areas are removed with a solvent, and finally the remaining lacquer layer is tempered. By any variation in the content of substituted anhydride groups formed in the polymer, resists having selected lithographic properties are available. |
| priorityDate | 1981-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.