http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DD-154917-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8c886665bc6c3e9597935ac4c4f080eb http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_59e8efadae2e3cfeb46a66ccea1bba23 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_53ef8793a9a9dc68687882fea870ad7d http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4e6801a95e4940fb0f1f2afe57dceddf |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 1980-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6cb48e0dfe4fe16d55131a495a419c93 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_029b1943cd52036c78914091a7aa2c80 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9a2a5b167261472469349bcc928cd078 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a96c3eb5c0ae920a9d0a4ba5decb26e0 |
| publicationDate | 1982-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DD-154917-A1 |
| titleOfInvention | DEVICE FOR LOADABLE CONTACTING OF DISK MULTIPLE OBJECTS |
| abstract | The invention relates to a device for releasably contacting semiconductor wafers using a liquid electrical conductor. The device can be used in particular for large-area ohmic or capacitive contacting of semiconductor wafers in process measurement technology for the qualitative and quantitative assessment of the component manufacturing process. It is thus possible to investigate properties of metal-insulator semiconductor structures by means of capacitance-voltage measurements or other methods on the process disks without quality reduction in the short term, without zambling the back of the disk or the front of the disk with metal. In addition, the disk can be manipulated in the liquid-contacted state. In the device according to the invention, which is shown in FIG. 1, a hollow body partially filled with an electrically conductive liquid is used, which is provided with a large number of openings and a vacuum suction for the purpose of large-area contacting. After tilting the Hohlkoerpers, on the Durchbruechen is a sucked by the vacuum disc, the liquid flows into the openings and creates a consisting of many individual contacts, grossflaechigen contact. |
| priorityDate | 1980-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23931 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556032 |
Total number of triples: 19.